The HVS 200 features 2 Zone High Vacuum Sealer for sealing of MEMS-Packaging under high vacuum. The electronic component can be processes before sealing in 2 heating zones with different temperatures up to 450 °C. This allows also the getter activation. There can be processed 6 packagings in parallel (maximum 6 adapters each with 42 mm diameter). A key feature is the automatically positioning and sealing of the parts, whereas both parts must have the same temperature. The control of different heat-up ramp rates and/or ramp-down is excellent.
6 Adapters with 42mm diameter each
© 2013 NPOS Technologies. All Rights Reserved